Document Type: Original Research Paper
Department of Chemistry, Science and Research Branch, Islamic Azad University, Tehran, Iran
Plasma Physics Research Center, Science and Research Branch, Islamic Azad University
Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran
Department of Chemistry, Shahr Qods Branch, Islamic Azad University, ShahreQods, Iran
Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on
the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene
(C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as
the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth
conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has
a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures.
This research was conducted to investigate the effect of catalyst preparation and growth conditions.
Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to
characterize the diamond-like carbon nano-structures produced under different conditions.