The Growth of Diamond-like Carbon Nano-Structures: Investigation of the Affecting Factors

Document Type : Original Research Paper


1 Department of Chemistry, Science and Research Branch, Islamic Azad University, Tehran, Iran

2 Plasma Physics Research Center, Science and Research Branch, Islamic Azad University

3 Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran

4 Department of Chemistry, Shahr Qods Branch, Islamic Azad University, ShahreQods, Iran


Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on
the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene
(C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as
the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth
conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has
a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures.
This research was conducted to investigate the effect of catalyst preparation and growth conditions.
Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to
characterize the diamond-like carbon nano-structures produced under different conditions.